Effect of substrate temperature on the structure, electrical and optical properties of Mo doped ZnO films

被引：18

作者：

Chen, Guifeng ^{[1
]}

Zhao, Xiaoli ^{[1
]}

Zhang, Hui ^{[1
]}

Wang, He ^{[1
]}

Liu, Feifei ^{[1
]}

Zhang, Xiaoqiang ^{[1
]}

Gao, Jianbo ^{[2
]}

Zhao, Yanmin ^{[3
]}

Zhang, Chao ^{[3
]}

Tao, Junguang ^{[1
]}

机构：

[1] Hebei Univ Technol, Sch Mat Sci & Engn, Key Lab New Type Funct Mat Hebei Prov, Tianjin 300130, Peoples R China

[2] China Inst Atom Energy, Beijing 102413, Peoples R China

[3] China Elect Technol Grp Corp, Res Inst 18, Tianjin 300384, Peoples R China

来源：

MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS | 2016年 / 211卷

基金：

中国国家自然科学基金;

关键词：

Molybdenum-doped ZnO; Magnetron sputtering; Transparent conductive oxides films; PULSED-LASER DEPOSITION; THIN-FILMS; SPRAY-PYROLYSIS; CELL APPLICATIONS;

D O I：

10.1016/j.mseb.2016.05.020

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Mo-doped ZnO (MZO) transparent conductive thin films were prepared on glass substrate under various substrate temperature from 50 degrees C to 200 degrees C. The microstructural, electrical and optical properties of the MZO films were investigated by X-ray diffraction (XRD), Hall effect and UV-vis spectrophotometer. Based on XRD measurements, all films are polycrystalline with preferential c-axis growth. The lowest resistivity was obtained to be 2.8 x 10(-3) Omega.cm. According to X-ray photoelectron spectroscopy (XPS) measurement, the valence of the Mo ions in the ZnO matrix is a mixture of +5 and +6. In addition, the transmittance of the film is 80% throughout the visible light region. Our results indicate that the MZO films are suitable for potential transparent optoelectronic applications. (C) 2016 Elsevier B.V. All rights reserved.

引用

页码：135 / 140

页数：6

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