MEMS based Piezoelectric Sensor System for Virus Detection

In this paper we design a novel piezoelectric MEMS sensor for the detection of 100nm size viruses that include HIV and Herpes. A PZT-5A piezoelectric micro cantilever of length 500 mu m is used in the model for sensing changes in mechanical vibrations caused by adsorption of virus mass of the order of ng at the tip of cantilever, producing an output signal at different resonant frequencies. A COMSOL model for the MEMS based piezoelectric sensor shows high sensitivity to changes in attached mass at the tip. This would allow the sensor system to be used for detection of specific viruses by incorporating appropriate biomarkers that provide selective binding for such viruses. Design of op-amp based signal processing circuits provides high gain, low noise output. The results strongly indicate the reliability of designed sensor for 100 nm HIV, Herpes viruses.