Surface analysis of hard coatings deposited by modified pulse arc process

被引：1

作者：

Keutel, K

Fuchs, H

Edelmann, C

Mecke, H

机构：

[1] Univ Magdeburg, FNW, IEP, AVP, D-39106 Magdeburg, Germany

[2] Univ Magdeburg, FET, IELE, D-39106 Magdeburg, Germany

来源：

TRENDS AND NEW APPLICATIONS OF THIN FILMS | 1998年 / 287-2卷

关键词：

pulse arc deposition; nitride coatings; droplet emission;

D O I：

10.4028/www.scientific.net/MSF.287-288.185

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The modified pulse are process is a new development for the deposition of thin films. TiN, CrN and TiBN were deposited on stainless steel and polished high speed steel. The emission of droplets was investigated using the commercial d.c. cathodic are deposition and the modified pulse are deposition. For a global expression of deposited droplets the surfaces were scanned with a profilometer. The droplet density was established by counting of droplets in scanning micrographs of thin film surfaces. The results of analysis show that the new process can reduce the deposited droplets. However, this is influenced by the pulse parameters. The chemical composition of the films is independent of the used deposition process.

引用

页码：185 / 188

页数：4