共 10 条
[7]
Improvements of defects by patterning using thermal nanoimprint lithography
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS,
2007, 46 (4A)
:1808-1814
[9]
Controlled co-evaporation of silanes for nanoimprint stamps
[J].
NANOTECHNOLOGY,
2005, 16 (05)
:S171-S175