Epitaxial growth of InN films on MgAl2O4 (111) substrates

被引：4

作者：

Tsuchiya, T ^{[1
]}

Miki, O ^{[1
]}

Shimada, K ^{[1
]}

Ohnishi, M ^{[1
]}

Wakahara, A ^{[1
]}

Yoshida, A ^{[1
]}

机构：

[1] Toyohashi Univ Technol, Dept Elect & Elect Engn, Toyohashi, Aichi 4418580, Japan

来源：

JOURNAL OF CRYSTAL GROWTH | 2000年 / 220卷 / 03期

关键词：

InN; MgAl2O4 (111) substrate; group-III nitride;

D O I：

10.1016/S0022-0248(00)00547-9

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

Epitaxial InN layers were deposited on MgAl2O4 (1 1 1) substrates by microwave-excited metalorganic vapor-phase epitaxy. The crystallographic orientation relationships between the InN layer and MgAl2O4 (1 1 1) were InN (0 0 . 1)\\MgAl2O4 (1 1 1) and InN [1 1 . 0]\\MgAl2O4 [1 0 0]. The full-width at half-maximum of the X-ray rocking curve of 97 arcsec was obtained on MgAl2O4 (1 1 1). (C) 2000 Published by Elsevier Science B.V.

引用

页码：185 / 190

页数：6

共 34 条

[31] Growth and characterization of epitaxial InN films on sapphire substrate using an ArF excimer laser-assisted metalorganic vapor-phase epitaxy (LA-MOVPE) [J].

Bhuiyan, AG ;

Tanaka, T ;

Kasashima, K ;

Hashimoto, A ;

Yamamoto, A .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2003, 42 (12) :7284-7289

[32] Zinc gallate (ZnGa2O4) epitaxial thin films: determination of optical properties and bandgap estimation using spectroscopic ellipsometry [J].

Bairagi, Samiran ;

Hsiao, Ching-Lien ;

Magnusson, Roger ;

Birch, Jens ;

Chu, Jinn P. ;

Tarntair, Fu-Gow ;

Horng, Ray-Hua ;

Jarrendahl, Kenneth .

OPTICAL MATERIALS EXPRESS, 2022, 12 (08) :3284-3295

[33] CRYSTAL-STRUCTURE AND ORIENTATION OF ALXIN1-XN EPITAXIAL LAYERS GROWN ON (0001)ALPHA-AL2O3 SUBSTRATES [J].

GUO, QX ;

ITOH, N ;

OGAWA, H ;

YOSHIDA, A .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1995, 34 (9A) :4653-4657

[34] MOCVD of InGaN on ScAlMgO4 on Al2O3 Substrates with Improved Surface Morphology and Crystallinity [J].

Wang, Guangying ;

Li, Yuting ;

Kirch, Jeremy ;

Han, Yizhou ;

Chen, Jiahao ;

Marks, Samuel ;

Mukhopadhyay, Swarnav ;

Liu, Rui ;

Liu, Cheng ;

Evans, Paul G. ;

Pasayat, Shubhra S. .

CRYSTALS, 2023, 13 (03)

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