Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining

被引:216
作者
Lin, Jintian [1 ,3 ]
Xu, Yingxin [2 ]
Fang, Zhiwei [1 ,4 ]
Wang, Min [1 ,3 ]
Song, Jiangxin [1 ,3 ]
Wang, Nengwen [1 ]
Qiao, Lingling [1 ]
Fang, Wei [2 ]
Cheng, Ya [1 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China
[2] Zhejiang Univ, Dept Opt Engn, State Key Lab Modern Opt Instrumentat, Hangzhou 310027, Zhejiang, Peoples R China
[3] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
[4] ShanghaiTech Univ, Sch Phys Sci & Technol, Shanghai 200031, Peoples R China
来源
SCIENTIFIC REPORTS | 2015年 / 5卷
关键词
MICROCAVITY; GENERATION; RESONATORS; SURFACE;
D O I
10.1038/srep08072
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
We report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling. The micrometer-scale (diameter similar to 82 mu m) LN resonator possesses a Q factor of similar to 2.5 X 10(5) around 1550 nm wavelength. The combination of femtosecond laser direct writing with FIB enables high-efficiency, high-precision nanofabrication of high-Q crystalline microresonators.
引用
收藏
页数:4
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