Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining

被引：215

作者：

Lin, Jintian ^{[1
,3
]}

Xu, Yingxin ^{[2
]}

Fang, Zhiwei ^{[1
,4
]}

Wang, Min ^{[1
,3
]}

Song, Jiangxin ^{[1
,3
]}

Wang, Nengwen ^{[1
]}

Qiao, Lingling ^{[1
]}

Fang, Wei ^{[2
]}

Cheng, Ya ^{[1
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China

[2] Zhejiang Univ, Dept Opt Engn, State Key Lab Modern Opt Instrumentat, Hangzhou 310027, Zhejiang, Peoples R China

[3] Univ Chinese Acad Sci, Beijing 100049, Peoples R China

[4] ShanghaiTech Univ, Sch Phys Sci & Technol, Shanghai 200031, Peoples R China

来源：

SCIENTIFIC REPORTS | 2015年 / 5卷

关键词：

MICROCAVITY; GENERATION; RESONATORS; SURFACE;

D O I：

10.1038/srep08072

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

We report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling. The micrometer-scale (diameter similar to 82 mu m) LN resonator possesses a Q factor of similar to 2.5 X 10(5) around 1550 nm wavelength. The combination of femtosecond laser direct writing with FIB enables high-efficiency, high-precision nanofabrication of high-Q crystalline microresonators.

引用

页数：4

共 23 条

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