Monolithically integrated micro flow sensor for lab-on-chip applications

被引：24
|
作者：
Schöler, L
Lange, B
Seibel, K
Schäfer, H
Walder, M
Friedrich, N
Ehrhardt, D
Schönfeld, F
Zech, G
Böhm, M
机构：
[1] Univ Siegen, Inst Microsyst Technol, D-57068 Siegen, Germany
[2] Inst Mikrotech Mainz GmbH, D-55129 Mainz, Germany
[3] Univ Siegen, Dept Phys, D-57068 Siegen, Germany
来源：
MICROELECTRONIC ENGINEERING | 2005年 / 78-79卷
关键词：
lab-on-chip; microfluidics; mass flow sensor;
D O I：
10.1016/j.mee.2004.12.022
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A monolithically integrated micro flow sensor (MFS) for lab-on-chip application is presented. The MFS utilizes a miniaturized adaption of the anemometric principle. The combination of an established detection principle with the benefits of microtechnology results in a sensor with very high sensitivity. The temperature distribution in the microfluidic channel is simulated and compared with experimental results. The experimental investigation confirms that the micro MFS is able to detect flow rates as low as 10 nl/min. (c) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码：164 / 170
页数：7
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