Humidity sensing properties of morphology-controlled ordered silicon nanopillar

被引：22

作者：

Li, Wei ^{[1
,2
,3
]}

Hu, Mingyue ^{[1
]}

Ge, Pengpeng ^{[1
]}

Wang, Jing ^{[1
]}

Guo, YanYan ^{[1
]}

机构：

[1] Nanjing Univ Posts & Telecommun, Coll Elect Sci & Engn, Nanjing 210003, Jiangsu, Peoples R China

[2] Key Lab Radio Frequency & Micronano Elect Jiangsu, Nanjing 210023, Jiangsu, Peoples R China

[3] Univ Calif San Diego, Dept Elect & Comp Engn, La Jolla, CA 92093 USA

来源：

APPLIED SURFACE SCIENCE | 2014年 / 317卷

基金：

中国国家自然科学基金;

关键词：

Ordered silicon nanoillar; Morphology-controlled; Humidity sensing; POROUS SILICON; GAS; NANOSTRUCTURES;

D O I：

10.1016/j.apsusc.2014.08.136

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Ordered silicon nanopillar array (Si-NPA) was fabricated by nanosphere lithography. The size of silicon nanopillars can be easily controlled by an etching process. The period and density of nanopillar arrays are determined by the initial diameter of polystyrene (PS) spheres. It was studied as a sensing material to detect humidity. Room temperature current sensitivity of Si-NPA sensor was investigated at a relative humidity (RH) ranging from 50 to 70%. As a result, the measured current showed there was a significant increase at 70% RH. The response and recovery time was about 10 s and 15s. These excellent sensing characteristics indicate that Si-NPA might be a practical sensing material. (C) 2014 Elsevier B.V. All rights reserved.

引用

页码：970 / 973

页数：4

共 15 条

[1] Synthesis and gas sensing properties of ZnO quantum dots [J].