A micromachined optical double well for thermo-optic switching via resonant tunneling effect

被引：20

作者：

Zhu, W. M. ^{[1
]}

Zhang, X. M. ^{[2
]}

Liu, A. Q. ^{[1
]}

Cai, H. ^{[1
]}

Jonathan, T. ^{[1
]}

Bourouina, T. ^{[3
]}

机构：

[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore

[2] Univ Maryland, Dept Mech Engn, College Pk, MD 20742 USA

[3] Ecole Super Ingn Electrotech & Electron, Sch Elect & Elect Engn, F-93162 Noisy Le Grand, France

来源：

APPLIED PHYSICS LETTERS | 2008年 / 92卷 / 25期

关键词：

Resonant tunneling;

D O I：

10.1063/1.2951621

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This letter presents the thermo-optic switching characteristics of an optical double-well structure, which has a high-low-high-low-high refractive index construct formed by micromachined silicon prisms and air gaps. Analysis shows such structure features full transmission (i.e., on state) and requires low refractive index change for switching function. The device is fabricated on silicon-on-isolator wafer using deep etching process. In experiment, it measures a switching speed of 1 mu s and an extinction ratio of 30 dB. Compared with the other micromachined switches, this device utilizes different physical principle and processes various merits such as fast switching speed and low power consumption. (C) 2008 American Institute of Physics.

引用

页数：3

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