Ga2O3 and Related Ultra-Wide Bandgap Power Semiconductor Oxides: New Energy Electronics Solutions for CO2 Emission Mitigation

被引:49
作者
Chi, Zeyu [1 ]
Asher, Jacob J. [2 ]
Jennings, Michael R. [2 ]
Chikoidze, Ekaterine [1 ]
Perez-Tomas, Amador [3 ,4 ]
机构
[1] Univ Paris Saclay, CNRS, UVSQ, Grp Etude Matiere Condensee GEMaC, 45 Av Etats Unis, F-78035 Versailles, France
[2] Swansea Univ, Coll Engn, Bay Campus,Fabian Way, Swansea SA1 8EN, W Glam, Wales
[3] CSIC, Catalan Inst Nanosci & Nanotechnol ICN2, Barcelona 08193, Spain
[4] BIST, Campus UAB, Barcelona 08193, Spain
关键词
energy electronics; ultra-wide bandgap; power electronics; diodes; transistors; gallium oxide; Ga2O3; spinel; ZnGa2O4; BETA-GA2O3; SINGLE-CRYSTALS; SCHOTTKY-BARRIER DIODES; DOPED BETA-GA2O3; OPTICAL-PROPERTIES; THIN-FILMS; HETEROEPITAXIAL GROWTH; ELECTRICAL-PROPERTIES; BLOCKING VOLTAGE; GALLIUM OXIDE; SAPPHIRE; 0001;
D O I
10.3390/ma15031164
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Currently, a significant portion (~50%) of global warming emissions, such as CO2, are related to energy production and transportation. As most energy usage will be electrical (as well as transportation), the efficient management of electrical power is thus central to achieve the XXI century climatic goals. Ultra-wide bandgap (UWBG) semiconductors are at the very frontier of electronics for energy management or energy electronics. A new generation of UWBG semiconductors will open new territories for higher power rated power electronics and solar-blind deeper ultraviolet optoelectronics. Gallium oxide-Ga2O3 (4.5-4.9 eV), has recently emerged pushing the limits set by more conventional WBG (~3 eV) materials, such as SiC and GaN, as well as for transparent conducting oxides (TCO), such asIn(2)O(3), ZnO and SnO2, to name a few. Indeed, Ga2O3 as the first oxide used as a semiconductor for power electronics, has sparked an interest in oxide semiconductors to be investigated (oxides represent the largest family of UWBG). Among these new power electronic materials, AlxGa1-xO3 may provide high-power heterostructure electronic and photonic devices at bandgaps far beyond all materials available today (~8 eV) or ZnGa2O4 (~5 eV), enabling spinel bipolar energy electronics for the first time ever. Here, we review the state-of-the-art and prospects of some ultra-wide bandgap oxide semiconductor arising technologies as promising innovative material solutions towards a sustainable zero emission society.
引用
收藏
页数:26
相关论文
共 193 条
[31]   Tuning electrical conductivity of β-Ga2O3 single crystals by Ta doping [J].
Cui, Huiyuan ;
Mohamed, H. F. ;
Xia, Changtai ;
Sai, Qinglin ;
Zhou, Wei ;
Qi, Hongji ;
Zhao, Jingtai ;
Si, Jiliang ;
Ji, Xiaoli .
JOURNAL OF ALLOYS AND COMPOUNDS, 2019, 788 :925-928
[32]   Microstructure, optical, and photoluminescence properties of β-Ga2O3 films prepared by pulsed laser deposition under different oxygen partial pressures [J].
Cui, Rui-Rui ;
Zhang, Jun ;
Luo, Zi-Jiang ;
Guo, Xiang ;
Ding, Zhao ;
Deng, Chao-Yong .
CHINESE PHYSICS B, 2021, 30 (02)
[33]   Stability and degradation of isolation and surface in Ga2O3 devices [J].
De Santi, C. ;
Nardo, A. ;
Wong, M. H. ;
Goto, K. ;
Kuramata, A. ;
Yamakoshi, S. ;
Murakami, H. ;
Kumagai, Y. ;
Higashiwaki, M. ;
Meneghesso, G. ;
Zanoni, E. ;
Meneghini, M. .
MICROELECTRONICS RELIABILITY, 2019, 100
[34]   High-Performance Ga2O3 Diode Based on Tin Oxide Schottky Contact [J].
Du, Lulu ;
Xin, Qian ;
Xu, Mingsheng ;
Liu, Yaxuan ;
Mu, Wenxiang ;
Yan, Shiqi ;
Wang, Xinyu ;
Xin, Gongming ;
Jia, Zhitai ;
Tao, Xu-Tang ;
Song, Aimin .
IEEE ELECTRON DEVICE LETTERS, 2019, 40 (03) :451-454
[35]   Catalytic growth and characterization of single crystalline Zn doped p-type β-Ga2O3 nanowires [J].
Feng, Qiuju ;
Liu, Jiayuan ;
Yang, Yuqi ;
Pan, Dezhu ;
Xing, Yan ;
Shi, Xiaochi ;
Xia, Xiaochuan ;
Liang, Hongwei .
JOURNAL OF ALLOYS AND COMPOUNDS, 2016, 687 :964-968
[36]   MOCVD homoepitaxy of Si-doped (010) β-Ga2O3 thin films with superior transport properties [J].
Feng, Zixuan ;
Bhuiyan, A. F. M. Anhar Uddin ;
Karim, Md Rezaul ;
Zhao, Hongping .
APPLIED PHYSICS LETTERS, 2019, 114 (25)
[37]  
Fontserè A, 2012, PROC INT SYMP POWER, P37, DOI 10.1109/ISPSD.2012.6229017
[38]   Micro and nano analysis of 0.2 Ω mm Ti/Al/Ni/Au ohmic contact to AlGaN/GaN [J].
Fontsere, A. ;
Perez-Tomas, A. ;
Placidi, M. ;
Llobet, J. ;
Baron, N. ;
Chenot, S. ;
Cordier, Y. ;
Moreno, J. C. ;
Gammon, P. M. ;
Jennings, M. R. ;
Porti, M. ;
Bayerl, A. ;
Lanza, M. ;
Nafria, M. .
APPLIED PHYSICS LETTERS, 2011, 99 (21)
[39]   Temperature dependence of Al/Ti-based Ohmic contact to GaN devices: HEMT and MOSFET [J].
Fontsere, A. ;
Perez-Tomas, A. ;
Placidi, M. ;
Fernandez-Martinez, P. ;
Baron, N. ;
Chenot, S. ;
Cordier, Y. ;
Moreno, J. C. ;
Gammon, P. M. ;
Jennings, M. R. .
MICROELECTRONIC ENGINEERING, 2011, 88 (10) :3140-3144
[40]   A review of β-Ga2O3 single crystal defects, their effects on device performance and their formation mechanism [J].
Fu, Bo ;
Jia, Zhitai ;
Mu, Wenxiang ;
Yin, Yanru ;
Zhang, Jian ;
Tao, Xutang .
JOURNAL OF SEMICONDUCTORS, 2019, 40 (01)