Detection of boron nitride radicals by emission spectroscopy in a laser-induced plasma

被引:9
作者
Dutouquet, C
Acquaviva, S
Hermann, J
机构
[1] Univ Orleans, CNRS, GREMI, F-45067 Orleans 2, France
[2] Univ Lecce, INFM, Dept Phys, I-73100 Lecce, Italy
关键词
pulsed laser ablation; boron nitride; plasma spectroscopy; molecular spectra simulation;
D O I
10.1016/S0584-8547(01)00188-4
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
Several vibrational bands of boron nitride radicals have been observed in a plasma produced by pulsed-laser ablation of a boron nitride target in low-pressure nitrogen or argon atmospheres. Using time- and space-resolved emission spectroscopic measurements with a high dynamic range, the most abundant isotopic species (BN)-N-11 have been detected. The emission bands in the spectral range from 340 to 380 nm belong to the Delta nu = -1, 0, +1 sequences of the triplet system (transition A(3)Pi -X(3)Pi). For positive identification, the molecular emission bands have been compared with synthetic spectra obtained by computer simulations. Furthermore, WON emission bands have been reproduced by computer simulation using molecular constants which have been deduced from the (BN)-N-11 constants. Nevertheless, the presence of the lower abundant isotopic radical WON was not proved due the noise level which masked the low emission intensity of the WON band heads. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:629 / 635
页数:7
相关论文
共 17 条
[1]   Optical emission diagnostic of laser-induced plasma during CNx film deposition [J].
Aldea, E ;
Caricato, AP ;
Dinescu, G ;
Luches, A ;
Perrone, A .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (7B) :4686-4689
[2]   OPTICAL-EMISSION DIAGNOSTICS OF LASER-INDUCED PLASMA FOR DIAMOND-LIKE FILM DEPOSITION [J].
CHEN, X ;
MAZUMDER, J ;
PUROHIT, A .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1991, 52 (05) :328-334
[3]   Gas-phase reactions during reactive laser ablation of Ti and Si in N-2 and O-2 rarefied atmospheres analysed using energy-dispersive mass spectrometry [J].
Coccia, LG ;
Tyrrell, GC ;
Boyd, IW .
APPLIED SURFACE SCIENCE, 1997, 109 :413-418
[4]   LASER-REACTIVE ABLATION DEPOSITION OF SILICON-NITRIDE FILMS [J].
DEGIORGI, ML ;
LEGGIERI, G ;
LUCHES, A ;
MARTINO, M ;
PERRONE, A ;
MAJNI, G ;
MENGUCCI, P ;
ZEMEK, J ;
MIHAILESCU, IN .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1995, 60 (03) :275-283
[5]   The energy levels of a rotating vibrator [J].
Dunham, JL .
PHYSICAL REVIEW, 1932, 41 (06) :721-731
[6]   SYNTHESIS OF SIO2 THIN-FILMS BY REACTIVE EXCIMER LASER ABLATION [J].
FOGARASSY, E ;
SLAOUI, A ;
FUCHS, C ;
STOQUERT, JP .
APPLIED SURFACE SCIENCE, 1992, 54 :180-186
[7]   Analyses of gas-phase reactions during reactive laser ablation using emission spectroscopy [J].
Hermann, J ;
Dutouquet, C .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1999, 32 (21) :2707-2713
[8]   Diagnostics of the early phase of an ultraviolet laser induced plasma by spectral line analysis considering self-absorption [J].
Hermann, J ;
Boulmer-Leborgne, C ;
Hong, D .
JOURNAL OF APPLIED PHYSICS, 1998, 83 (02) :691-696
[9]   PLASMA DIAGNOSTICS IN PULSED-LASER TIN LAYER DEPOSITION [J].
HERMANN, J ;
THOMANN, AL ;
BOULMERLEBORGNE, C ;
DUBREUIL, B ;
DEGIORGI, ML ;
PERRONE, A ;
LUCHES, A ;
MIHAILESCU, IN .
JOURNAL OF APPLIED PHYSICS, 1995, 77 (07) :2928-2936
[10]  
HERZBERG G, 1950, MOL SPECTRA MOL STRU, P235