Microfluidics based on ZnO/nanocrystalline diamond surface acoustic wave devices

被引：48

作者：

Fu, Y. Q. ^{[1
]}

Garcia-Gancedo, L. ^{[2
]}

Pang, H. F. ^{[1
,3
]}

Porro, S. ^{[4
]}

Gu, Y. W. ^{[1
]}

Luo, J. K. ^{[5
]}

Zu, X. T. ^{[3
]}

Placido, F. ^{[1
]}

Wilson, J. I. B. ^{[4
]}

Flewitt, A. J. ^{[2
]}

Milne, W. I. ^{[2
]}

机构：

[1] Univ W Scotland, Thin Film Ctr, SUPA, Paisley PA1 2BE, Renfrew, Scotland

[2] Univ Cambridge, Elect Engn Div, Dept Engn, Cambridge CB3 0FA, England

[3] Univ Elect Sci & Technol China, Dept Appl Phys, Chengdu 610054, Peoples R China

[4] Heriot Watt Univ, SUPA, Sch Engn & Phys Sci, Edinburgh EH14 4AS, Midlothian, Scotland

[5] Univ Bolton, IMRI, Bolton BL3 5AB, England

来源：

BIOMICROFLUIDICS | 2012年 / 6卷 / 02期

基金：

英国工程与自然科学研究理事会;

关键词：

NANOCRYSTALLINE DIAMOND; FREQUENCY; REFLECTIONS; FILM;

D O I：

10.1063/1.3699974

中图分类号：

Q5 [生物化学];

学科分类号：

071010 ; 081704 ;

摘要：

Surface acoustic wave (SAW) devices with 64 mu m wavelength were fabricated on a zinc oxide (ZnO) film deposited on top of an ultra-smooth nanocrystalline diamond (UNCD) layer. The smooth surface of the UNCD film allowed the growth of the ZnO film with excellent c-axis orientation and low surface roughness, suitable for SAW fabrication, and could restrain the wave from significantly dissipating into the substrate. The frequency response of the fabricated devices was characterized and a Rayleigh mode was observed at similar to 65.4 MHz. This mode was utilised to demonstrate that the ZnO/UNCD SAW device can be successfully used for microfluidic applications. Streaming, pumping, and jetting using microdroplets of 0.5 and 20 mu l were achieved and characterized under different powers applied to the SAW device, focusing more on the jetting behaviors induced by the ZnO SAW. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.3699974]

引用

页数：11

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