Light-induced change of Si-H bond absorption in hydrogenated amorphous silicon

被引：0

作者：

Yue, GZ ^{[1
]}

Chen, LF ^{[1
]}

Wang, Q ^{[1
]}

Iwaniczko, E ^{[1
]}

Kong, GL ^{[1
]}

Baugh, J ^{[1
]}

Wu, Y ^{[1
]}

Han, DX ^{[1
]}

机构：

[1] Acad Sinica, Inst Semicond, Beijing 100083, Peoples R China

来源：

AMORPHOUS AND MICROCRYSTALLINE SILICON TECHNOLOGY-1998 | 1998年 / 507卷

关键词：

D O I：

10.1557/PROC-507-685

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Device-quality a-Si:H films were prepared by glow discharge CVD with pure or H-diluted silane as well as by hot-wire CVD. The hydrogen content was varied from similar to 2 to 15 at. %. The Si-H bond absorption and its light-soaking-induced changes were studied by IR and differential IR absorption spectroscopes. The results indicate that the more stable sample exhibits an increase of the absorption at wave number similar to 2000 cm(-1), and the less stable one exhibits a decrease at similar to 2040 cm(-1) and an increase at similar to 1880 cm(-1).

引用

页码：685 / 690

页数：6

共 50 条

[41] EVIDENCE FOR LIGHT-INDUCED INCREASE OF SI-H BONDS IN UNDOPED A-SI-H
ZHAO, YP
ZHANG, DL
KONG, GL
PAN, GQ
LIAO, XB
PHYSICAL REVIEW LETTERS, 1995, 74 (04) : 558 - 561
[42] ON THE MECHANISM OF LIGHT-INDUCED EFFECTS IN HYDROGENATED AMORPHOUS-SILICON ALLOYS
GUHA, S
YANG, J
CZUBATYJ, W
HUDGENS, SJ
HACK, M
APPLIED PHYSICS LETTERS, 1983, 42 (07) : 588 - 589
[43] Effect of embedded microcrystallites on the light-induced degradation of hydrogenated amorphous silicon
Lubianiker, Y
Cohen, JD
Jin, HC
Abelson, JR
PHYSICAL REVIEW B, 1999, 60 (07): : 4434 - 4437
[44] THEORETICAL INVESTIGATIONS OF THE LIGHT-INDUCED EFFECTS IN HYDROGENATED AMORPHOUS-SILICON
ADLER, D
SOLAR CELLS, 1987, 21 : 439 - 448
[45] Recombination processes and light-induced defect creation in hydrogenated amorphous silicon
Morigaki, K.
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2009, 206 (05): : 868 - 873
[46] LIGHT-INDUCED DEFECTS IN THERMAL ANNEALED HYDROGENATED AMORPHOUS-SILICON
SERRA, J
BERTOMEU, J
SARDIN, G
ROCH, C
ASENSI, JM
ANDREU, J
MORENZA, JL
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 1992, 28 (01) : 49 - 57
[47] LIGHT-INDUCED ESR IN VARIOUSLY TREATED HYDROGENATED AMORPHOUS-SILICON
ZHOU, JH
KUMEDA, M
SHIMIZU, T
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1995, 34 (8A): : 3982 - 3986
[48] LIGHT-INDUCED EFFECTS IN HYDROGENATED AMORPHOUS SILICON AT LOW TEMPERATURES.
Lee, Choochon
Yoon, Jong-Hwan
Jang, Jin
1600, (77-78 Dec II):
[49] Hydrogen collision model of light-induced metastability in hydrogenated amorphous silicon
Branz, HM
SOLID STATE COMMUNICATIONS, 1998, 105 (06) : 387 - 391
[50] Hydrogen dynamics and light-induced structural changes in hydrogenated amorphous silicon
Abtew, T. A.
Drabold, D. A.
PHYSICAL REVIEW B, 2006, 74 (08):

← 1 2 3 4 5 →