We report for the first time the development of state-of-the art SiC MESFET's on high-resistivity 4H-SiC substrates, 0.5 mu m gate MESFET's in this material show a new record high f(max) of 42 GKz and RF gain of 5.1 dB at 20 GHz. These devices also show simultaneously high drain current, and gate-drain breakdown voltage of 500 mA/mm, and 100 V, respectively showing their potential for RF power applications.