Langasite for microelectromechanical systems

被引：12

作者：

Ansorge, Erik ^{[1
]}

Schmidt, Bertram ^{[1
]}

Sauerwald, Jan ^{[2
]}

Fritze, Holger ^{[2
]}

机构：

[1] Otto VonGuericke Univ Magdegurg, Inst Micro & Sensorsyst, D-39016 Magdeburg, Germany

[2] Tech Univ Clausthal, LaserApplicationCtr, D-38640 Goslar, Germany

来源：

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2011年 / 208卷 / 02期

关键词：

etching; langasite; microelectromechanical systems; piezoelectric devices; LA3GA5SIO14; GROWTH;

D O I：

10.1002/pssa.201026508

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Piezoelectrically actuated plano-convex thickness shear mode (TSM) resonators in lanthanum gallium silicate (langasite, LGS, La3Ga5SiO14) were fabricated. For the fabrication of the devices different micromachining technologies were investigated. Finally, a wet etching process and a dry etching process were developed and furthermore graytone-lithography in combination with photoresist melting has been applied for the final device fabrication. The plano-convex shape of the resonators is necessary to improve the Q-factor of the devices. Simulations have been run to show the influence of the spherically contoured surface. The resulting Q-factor was higher than for simple planar resonators, reaching values of about 25 000. Furthermore, the conductance spectra were significantly improved. The special characteristics of langasite allow working temperatures of up to 1450 degrees C. At 800 degrees C Q-factors of 1700 could be achieved. (c) 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

引用

页码：377 / 389

页数：13

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