Flexible Pressure Sensors with Combined Spraying and Self-Diffusion of Carbon Nanotubes

被引:50
作者
Zhang, Xin [1 ,2 ]
Lu, Lijun [1 ,2 ]
Wang, Wenduo [1 ,2 ]
Zhao, Ning [1 ,4 ]
He, Peng [3 ]
Liu, Jingquan [1 ]
Yang, Bin [1 ]
机构
[1] Shanghai Jiao Tong Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai 200240, Peoples R China
[2] Shanghai Jiao Tong Univ, Sch Elect Informat & Elect Engn, Dept Micro Nano Elect, Shanghai 200240, Peoples R China
[3] Nucl Power Inst China, Sci & Technol Reactor Syst Design Technol Lab, Chengdu 610213, Peoples R China
[4] Shanghai Jiao Tong Univ, Shanghai Peoples Hosp 9, Coll Stomatol, Dept Orthodont,Sch Med,Natl Ctr Stomatol,Natl Clin, Shanghai 200011, Peoples R China
基金
中国国家自然科学基金;
关键词
pressure sensor; wearable electronics; physiological signal monitoring; carbon nanotube self-diffusion; ultrahigh sensitivity; sandwich-like structure; ELECTRONIC SKIN; HIGH-RESOLUTION; TRANSPARENT; FILM;
D O I
10.1021/acsami.2c12240
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
High-performance wearable sensors are required for applications in medical health and human-machine interaction, but their application has limited owing to the trade-off between sensitivity, pressure range, and durability. Herein, we propose the combined spraying and self-diffusion process of carbon nanotubes (CNTs) to balance and improve these parameters with the CNTs spontaneously diffusing into the film surface before the film curing. The obtained sensor not only achieves high sensitivity (155.54 kPa(-1)) and ultrawide pressure detection range (0.1-500 kPa) but also exhibits exceptional durability (over 12,000 pressure cycles at a high pressure of 300 kPa). In addition, the sensor exhibits a fast response (25 ms), good stability, and full flexibility. This process is a general approach that may improve the performance of various types of thin film piezoresistive sensors. Besides, the fabricated sensors can be flexibly scaled into sensor arrays and communicate with smart devices to achieve wireless smart monitoring. At present, the sensor shows broad application prospects in the fields of intelligent medical health and motion sensing.
引用
收藏
页码:38409 / 38420
页数:12
相关论文
共 57 条
[1]   Development of Ti3C2Tx/NiSe2 Nanohybrid-Based Large-Area Pressure Sensors as a Smart Bed for Unobtrusive Sleep Monitoring [J].
Adepu, Vivek ;
Kamath, Krutarth ;
Mattela, Venkat ;
Sahatiya, Parikshit .
ADVANCED MATERIALS INTERFACES, 2021, 8 (18)
[2]   Graded intrafillable architecture-based iontronic pressure sensor with ultra-broad-range high sensitivity [J].
Bai, Ningning ;
Wang, Liu ;
Wang, Qi ;
Deng, Jue ;
Wang, Yan ;
Lu, Peng ;
Huang, Jun ;
Li, Gang ;
Zhang, Yuan ;
Yang, Junlong ;
Xie, Kewei ;
Zhao, Xuanhe ;
Guo, Chuan Fei .
NATURE COMMUNICATIONS, 2020, 11 (01)
[3]   Hybrid porous micro structured finger skin inspired self-powered electronic skin system for pressure sensing and sliding detection [J].
Chen, Haotian ;
Song, Yu ;
Guo, Hang ;
Miao, Liming ;
Chen, Xuexian ;
Su, Zongming ;
Zhang, Haixia .
NANO ENERGY, 2018, 51 :496-503
[4]   Ultrafast-Response/Recovery Flexible Piezoresistive Sensors with DNA-Like Double Helix Yarns for Epidermal Pulse Monitoring [J].
Chen, Jianming ;
Zhang, Jun ;
Hu, Jinlian ;
Luo, Ningqi ;
Sun, Fengxin ;
Venkatesan, Harun ;
Zhao, Ni ;
Zhang, Yuanting .
ADVANCED MATERIALS, 2022, 34 (02)
[5]   Bioinspired Microspines for a High-Performance Spray Ti3C2Tx MXene-Based Piezoresistive Sensor [J].
Cheng, Yongfa ;
Ma, Yanan ;
Li, Luying ;
Zhu, Meng ;
Yue, Yang ;
Liu, Weijie ;
Wang, Longfei ;
Jia, Shuangfeng ;
Li, Chen ;
Qi, Tianyu ;
Wang, Jianbo ;
Gao, Yihua .
ACS NANO, 2020, 14 (02) :2145-2155
[6]   Micropatterned Pyramidal Ionic Gels for Sensing Broad-Range Pressures with High Sensitivity [J].
Cho, Sung Hwan ;
Lee, Seung Won ;
Yu, Seunggun ;
Kim, Hyeohn ;
Chang, Sooho ;
Kang, Donyoung ;
Hwang, Ihn ;
Kang, Han Sol ;
Jeong, Beomjin ;
Kim, Eui Hyuk ;
Cho, Suk Man ;
Kim, Kang Lib ;
Lee, Hyungsuk ;
Shim, Wooyoung ;
Park, Cheolmin .
ACS APPLIED MATERIALS & INTERFACES, 2017, 9 (11) :10128-10135
[7]   Highly Stretchable Resistive Pressure Sensors Using a Conductive Elastomeric Composite on a Micropyramid Array [J].
Choong, Chwee-Lin ;
Shim, Mun-Bo ;
Lee, Byoung-Sun ;
Jeon, Sanghun ;
Ko, Dong-Su ;
Kang, Tae-Hyung ;
Bae, Jihyun ;
Lee, Sung Hoon ;
Byun, Kyung-Eun ;
Im, Jungkyun ;
Jeong, Yong Jin ;
Park, Chan Eon ;
Park, Jong-Jin ;
Chung, U-In .
ADVANCED MATERIALS, 2014, 26 (21) :3451-3458
[8]   Conformable amplified lead zirconate titanate sensors with enhanced piezoelectric response for cutaneous pressure monitoring [J].
Dagdeviren, Canan ;
Su, Yewang ;
Joe, Pauline ;
Yona, Raissa ;
Liu, Yuhao ;
Kim, Yun-Soung ;
Huang, YongAn ;
Damadoran, Anoop R. ;
Xia, Jing ;
Martin, Lane W. ;
Huang, Yonggang ;
Rogers, John A. .
NATURE COMMUNICATIONS, 2014, 5
[9]   Stretchable and Soft Electronics using Liquid Metals [J].
Dickey, Michael D. .
ADVANCED MATERIALS, 2017, 29 (27)
[10]   Transparent Triboelectric Nanogenerators and Self-Powered Pressure Sensors Based on Micropatterned Plastic Films [J].
Fan, Feng-Ru ;
Lin, Long ;
Zhu, Guang ;
Wu, Wenzhuo ;
Zhang, Rui ;
Wang, Zhong Lin .
NANO LETTERS, 2012, 12 (06) :3109-3114