Modulation of residual stress in diamond like carbon films with incorporation of nanocrystalline gold

被引：42

作者：

Paul, R. ^{[1
]}

Bhattacharyya, S. R. ^{[1
]}

Bhar, R. ^{[1
]}

Pal, A. K. ^{[1
]}

机构：

[1] Jadavpur Univ, Dept Instrumentat Sci, Kolkata 700032, India

来源：

APPLIED SURFACE SCIENCE | 2011年 / 257卷 / 24期

关键词：

Diamond-like carbon; Nanocrystalline gold; Stress; SLIDING TRIBOLOGICAL BEHAVIORS; TENSILE PROPERTIES; ABSORPTION-EDGE; THIN-FILMS; DLC FILMS; C-H; COATINGS; GROWTH; AU; MICROSTRUCTURE;

D O I：

10.1016/j.apsusc.2011.06.144

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Residual stress modulation in the diamond-like carbon coatings with incorporation of gold nanoparticles was studied critically. The films were deposited on glass and Si (1 0 0) substrates by using capacitatively coupled plasma chemical vapor deposition. Stresses in the films were determined from the broadening of the optical absorption tail and were found to decrease from 2.3 GPa to 0.48 GPa with increasing gold content (2-7 at.% Au) in the DLC matrix. Gold incorporation also made the films harder than the corresponding DLC coatings. Modulation of stress with nanocrystalline gold content in the DLC matrix was related to the relative amount of sp(2)/sp(3) content in the DLC films. (C) 2011 Elsevier B.V. All rights reserved.

引用

页码：10451 / 10458

页数：8

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