Recent advances in MEMS mass spectrometers

In the past two decades, miniature mass spectrometers have developed rapidly as the requirements of on-site detection have been growing continuously. At present, it seems that further miniaturization of mass spectrom-eters meets its bottleneck, since the traditionally used processing technologies have been approaching to their limitations. MEMS (micro-electro mechanical systems) is a widely used microfabrication technology which pro -vides new solutions for the next generation of miniature mass spectrometers or MEMS mass spectrometers. Over the past three decades, a large number of key components of mass spectrometers, e.g., ion sources, mass analyz-ers, ion detectors, vacuum pumps and gauges, monolithic integrated mass spectrometer chips and so on, have all been microfabricated successfully. The development of MEMS mass spectrometers is ready for more rapid growth. In the article, the latest progress of MEMS mass spectrometers, potential applications, existing problems and challenges as well as future trends were reviewed.