A 50.1-Mpixel 14-Bit 250-frames/s Back-Illuminated Stacked CMOS Image Sensor With Column-Parallel kT/C-Canceling S&H and &UDELTA;ΣADC

被引:7
作者
Okada, Chihiro [1 ]
Zeituni, Golan [1 ]
Uemura, Koushi [1 ]
Hung, Luong [1 ]
Matsuura, Kouji [1 ]
Moue, Takashi [1 ]
Kodama, Kazutoshi [1 ]
Okano, Masafumi [1 ]
Morikawa, Takafumi [1 ]
Yamashita, Kazuyoshi [1 ]
Oka, Osamu [1 ]
Inada, Yoshiaki [1 ]
Shvartz, Itai [1 ]
Ben Shem, Ariel [1 ]
Eshel, Noam [1 ]
机构
[1] Sony Semicond Solut Corp, Atsugi, Kanagawa 2430014, Japan
关键词
Analog-to-digital converter (ADC); CMOS image sensor; high frame rate; high resolution; large optical format; low noise; low power;
D O I
10.1109/JSSC.2021.3111154
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This article presents a 50.1-Mpixel 14-bit 250-frames/s back-illuminated stacked CMOS image sensor on 35-mm optical format exhibiting 1.18-e(-)rms random noise at 0 dB. This sensor employs a load reduction technique by splitting half of pixel signal line using a Cu-Cu connection technology underneath the pixel area, pipelined operation with a gain-adaptive column-parallel kT/ C noise-canceling sample and hold, and a 250-frames/s scanning rate and 14-bit resolution delta-sigma analog-to-digital converter (ADC) circuit. Moreover, an on-chip online calibration of column mismatch maintains the non-linearity of the output image within -0.42%. As a result, FoM6 (e(-)* pJ/step) of 0.09 is obtained as the state-of-the-art performance.
引用
收藏
页码:3228 / 3235
页数:8
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