A 0.15μm Gate InAlN/GaN HEMT with thin Barrier layer

被引:0
作者
Zhou, Jianjun [1 ]
Dong, Xun [1 ]
Lu, Haiyn [1 ]
Kong, Ceng [1 ]
Kong, Yuechan [1 ]
Chen, Tangsheng [1 ]
Chen, Chen [1 ]
机构
[1] Nanjing Elect Devices Inst, Sci & Technol Monolith Integrated Circuits & Modu, Nanjing, Jiangsu, Peoples R China
来源
2014 IEEE INTERNATIONAL CONFERENCE ON ELECTRON DEVICES AND SOLID-STATE CIRCUITS (EDSSC) | 2014年
关键词
InAlN/GaN HEMT; thin barrier; millimeter-wave;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
High quality thin barrier layer In0.18Al0.82N/GaN heterostructure was grown by metal-organic chemical vapor deposition (MOCVD). A 0.15 mu m gate InAlN/GaN HEMT was fabricated with 1A/mm drain current at zero gate bias. The device show good pinch-off performance. A high transconductance of 482 mS/mm and current gain cutoff frequency of 80GHz were measured without de-embedding.
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页数:2
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