Current driven magnetic actuation of a MEMS silicon beam in a transmission electron microscope

被引：12

作者：

Lobato-Dauzier, Nicolas ^{[1
,2
]}

Denoual, Matthieu ^{[1
,2
,3
]}

Sato, Takaaki ^{[1
]}

Tachikawa, Saeko ^{[1
,2
]}

Jalabert, Laurent ^{[2
]}

Fujita, Hiroyuki ^{[1
,2
]}

机构：

[1] Univ Tokyo, Inst Ind Sci, Tokyo, Japan

[2] Univ Tokyo, UMI 2820, CNRS, LIMMS,Inst Ind Sci, Tokyo, Japan

[3] Univ Caen Basse Normandie, GREYC ENSICAEN, Caen, France

来源：

ULTRAMICROSCOPY | 2019年 / 197卷

关键词：

Magnetism - Silicon - Transmission electron microscopy - MEMS;

D O I：

10.1016/j.ultramic.2018.12.002

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

Micro-Electro-Mechanical-System (MEMS) devices associated to Transmission Electron Microscopes (TEM) have demonstrated their high potential for atomic resolution imaging of specimen while applying stress for mechanical testing. This paper introduces a novel actuation principle for the MEMS device in TEM relying on the internal magnetic field of the TEM and current flow through the device. The actuation principle is experimentally demonstrated in TEM and entirely modeled in the case of a silicon beam. The model is validated through static and dynamic experimental studies. The thermal side-effect of current flow is taken into account. The major advantages of the proposed magnetic actuation principle are the bidirectional control of the displacement of the device, the intrinsic linear displacement of the device with applied current and the potential milliNewton (mN) range force generation.

引用

页码：100 / 104

页数：5

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