Computational analysis of responses of micro electro-thermal actuators

The electrical, thermal, and mechanical responses of surface micromachined (SMM) 2-bearn actuators have been simulated using the Calagio code, a coupled physics analysis tool. The present analysis, unlike previous analyses, includes the surrounding air in the computational domain so that heat losses from the beams onto the silicon substrate will be accurately modeled. This setup is essential because the existing,shape factor' correlations have difficulty capturing the three-dimensional geometric effect of the heat loss in the shuttle at the center that connects the bent beams. In addition, results from the present analysis reveal that because the local heat flux can be extremely high, a significant temperature jump can occur across the air-structure interfaces.