Laser direct micro-machining with top-hat-converted single mode lasers

被引：5

作者：

Homburg, O. ^{[1
]}

Toennissen, F. ^{[1
]}

Mitra, T. ^{[1
]}

Lissotschenko, V. ^{[1
]}

机构：

[1] LIMO Lissotschenko Mikroopt GmbH, D-44319 Dortmund, Germany

来源：

LASER-BASED MICRO- AND NANOPACKAGING AND ASSEMBLY II | 2008年 / 6880卷

关键词：

Gaussian beam; top hat; beam transformation; micro-machining; throughput; speed;

D O I：

10.1117/12.762723

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Laser direct micro-machining processes are used in a variety of industries like inkjet printing, semiconductor processing, solar technology, flat-panel display production and medicine. Various kinds of materials, e.g. ceramics, metals, isolators, oxides, organics and semiconductors are being structured. In. most cases pulsed single mode solid state lasers with an inhomogeneous Gaussian beam profile are employed, like YAG lasers and their harmonics. However, the quality and functionality of the generated structures and micro-systems as well as the speed of the process can be improved by the utilization of homogeneous top hat profiles. The beam shaping principle of refractive Gaussian-to-top-hat converters is shown. Compact beam shaper modules based on this principle have been developed-supporting most direct laser micro-machining applications. The resulting process advantages are demonstrated by selected application results, namely the drilling of-holes and patterning of trenches for different kinds of materials.

引用

页数：7