Dielectric properties of Ta2O5-SiO2 polycrystalline ceramics

被引:29
作者
Cava, RJ
Krajewski, JJ
Peck, WF
Roberts, GL
机构
[1] Bell Laboratories, Lucent Technologies, Murray Hill, NJ 07974
关键词
D O I
10.1063/1.363068
中图分类号
O59 [应用物理学];
学科分类号
摘要
The dielectric properties of (Ta2O5)(1-x)(SiO2)(x) polycrystalline ceramics for 0.0 less than or equal to x less than or equal to 0.20 are reported. Measurements were made at 1 MHz and temperature between -40 and +100 degrees C. The dielectric properties are not very sensitive to SiO2 content. A moderate enhancement of the dielectric constant is found, from -30 for pure Ta2O5 to similar to 45 at x similar or equal to 0.10. The temperature coefficient of dielectric constant in the vincinity of room temperature decreases from similar to 200 ppm/degrees C for Ta2O5 to similar to 75 ppm/degrees C for x=0.14. (C) 1996 American Institute of Physics.
引用
收藏
页码:2346 / 2348
页数:3
相关论文
共 13 条
[1]   ENHANCEMENT OF THE DIELECTRIC-CONSTANT OF TA2O5 THROUGH SUBSTITUTION WITH TIO2 [J].
CAVA, RF ;
PECK, WF ;
KRAJEWSKI, JJ .
NATURE, 1995, 377 (6546) :215-217
[2]   EFFECTS OF ADDITIVE ELEMENTS ON ELECTRICAL-PROPERTIES OF TANTALUM OXIDE-FILMS [J].
FUJIKAWA, H ;
TAGA, Y .
JOURNAL OF APPLIED PHYSICS, 1994, 75 (05) :2538-2544
[3]  
Kwon K. W., 1994, IEDM, V94, P835
[4]   ELECTRICAL-PROPERTIES OF AL2O3-TA2O5 COMPOSITE DIELECTRIC THIN-FILMS PREPARED BY RF REACTIVE SPUTTERING [J].
NOMURA, K ;
OGAWA, H ;
ABE, A .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (04) :922-925
[5]   NEW BAO-TIO2 COMPOUND WITH TEMPERATURE-STABLE HIGH PERMITTIVITY AND LOW MICROWAVE LOSS [J].
OBRYAN, HM ;
THOMSON, J ;
PLOURDE, JK .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1974, 57 (10) :450-453
[6]   SOME DIELECTRIC PROPERTIES OF TANTALUM PENTOXIDE [J].
PAVLOVIC, AS .
JOURNAL OF CHEMICAL PHYSICS, 1964, 40 (04) :951-&
[7]  
ROTH RS, 1970, J RES NBS A PHYS CH, V74, P487
[8]  
Sayer M., 1992, Integrated Ferroelectrics, V1, P129, DOI 10.1080/10584589208215570
[9]   ELECTRICAL CHARACTERISTICS OF TANTALUM PENTOXIDE SILICON-DIOXIDE SILICON STRUCTURES [J].
SEKI, S ;
UNAGAMI, T ;
TSUJIYAMA, B .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1985, 132 (01) :199-202
[10]   DIELECTRIC POLARIZABILITIES OF IONS IN OXIDES AND FLUORIDES [J].
SHANNON, RD .
JOURNAL OF APPLIED PHYSICS, 1993, 73 (01) :348-366