Discharge KrF Laser with a High Specific Energy of Radiation

被引：1

作者：

Panchenko, Yu N. ^{[1
]}

Puchikin, A., V ^{[1
]}

Yampolskaya, S. A. ^{[1
]}

Andreev, M., V ^{[1
]}

Gorlov, E., V ^{[2
]}

Zharkov, V., I ^{[2
]}

机构：

[1] Russian Acad Sci, Inst High Current Elect, Siberian Branch, Tomsk 634055, Russia

[2] Russian Acad Sci, Zuev Inst Atmospher Opt, Siberian Branch, Tomsk 634055, Russia

来源：

TECHNICAL PHYSICS | 2022年 / 67卷 / 03期

基金：

俄罗斯科学基金会;

关键词：

KrF laser; pump power; specific radiation energy; volume discharge; laser efficiency; XECL LASER; GAS;

D O I：

10.1134/S1063784222040041

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report the results of experimental and numerical investigations of a discharge KrF laser with specific pump power of 3.5 and 7 MW/cm(3); generation is obtained with specific radiation pulse energy of about 6 and 9.5 J/L for an internal energy efficiency of about 4%. Time dependences of the formation of charged and excited particles in a dense excimer plasma with an electron concentration of similar to 10(16) cm(-3) are obtained. The conditions for effective operation of the laser are proposed, which will ensure a further increase in the specific radiation energy by more than two times with preserved high internal laser efficiency relative to the energy input into the discharge.

引用

页码：215 / 220

页数：6

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