Oxygen ion energy distribution: Role of ionization, resonant, and nonresonant charge-exchange collisions

被引：27

作者：

Babaeva, NY

Lee, JK ^{[1
]}

Shon, JW

Hudson, EA

机构：

[1] Pohang Univ Sci & Technol, Dept Elect & Elect Engn, Pohang 790784, South Korea

[2] Lam Res Corp, Fremont, CA 94538 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2005年 / 23卷 / 04期

关键词：

D O I：

10.1116/1.1943451

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Capacitively coupled rf discharge operating in oxygen/argon mixtures has been investigated using the particle-in-cell/Monte Carlo method. The roles of ionization, resonant and nonresonant charge-exchange collisions in the formation of ion energy distribution (IED) at the electrodes is investigated. By turning off/on the corresponding collisional processes, it is shown that ionization can play an essential role in formation of the IED structure. The relative contribution of ionization to IED is estimated. (c) 2005 American Vacuum Society.

引用

页码：699 / 704

页数：6

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