Ambient humidity monitoring using a 1D photonic crystal sensor fabricated with glancing angle deposition

被引:4
作者
Hawkeye, Matthew M. [1 ]
Krause, Kathleen M. [1 ]
Brett, Michael J. [1 ]
机构
[1] Univ Alberta, Dept Elect & Comp Engn, Edmonton, AB, Canada
来源
OPTICAL SENSORS 2009 | 2009年 / 7356卷
关键词
Photonic crystals; humidity sensor; optical sensing; glancing angle deposition; nanostructures; porous materials; THIN-FILMS; FILTERS; GROWTH;
D O I
10.1117/12.820731
中图分类号
TP7 [遥感技术];
学科分类号
081102 ; 0816 ; 081602 ; 083002 ; 1404 ;
摘要
We present the design, fabrication, and characterization of a GLAD-fabricated photonic crystal sensor with a bandgap located in the visible optical spectrum. The photonic crystal is fabricated from TiO2 using electron-beam evaporation in a GLAD capable vacuum deposition system. Changes in humidity over a wide range (from 3% to 90% relative humidity) are detected by a colour change in the film due to movement of the photonic bandgap. The colour changes are quantified by measuring the transmittance of white light. Coupling the sensitivity of the film with a simple visual feedback system eliminates the need for complicated measurement techniques. This is desirable to minimize the cost and power consumption of the sensor device, making it amenable to large-scale production and deployment.
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页数:8
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