Embedded nanostructures revealed in three dimensions

被引：141
作者：
Arslan, I
Yates, TJV
Browning, ND
Midgley, PA
机构：
[1] Univ Cambridge, Dept Mat Sci & Met, Cambridge CB2 3QZ, England
[2] Univ Calif Davis, Dept Chem Engn & Mat Sci, Davis, CA 95616 USA
[3] Univ Calif Berkeley, Lawrence Berkeley Lab, Natl Ctr Electron Microscopy, Berkeley, CA 94720 USA
来源：
SCIENCE | 2005年 / 309卷 / 5744期
基金：
英国工程与自然科学研究理事会;
关键词：
D O I：
10.1126/science.1116745
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
Nanotechnology creates a new challenge for materials characterization because device properties now depend on size and shape as much as they depend on the traditional parameters of structure and composition. Here we show that Z-contrast tomography in the scanning transmission electron microscope has been developed to determine the complete three-dimensional size and shape of embedded structures with a resolution of approximately 1 cubic nanometer. The results from a tin/silicon quantum dot system show that the positions of the quantum dots and their size, shape, structure, and formation mechanism can be determined directly. These methods are applicable to any system, providing a unique and versatile three-dimensional visualization tool.
引用
收藏
页码：2195 / 2198
页数：4
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