Quantitative evaluation of annular bright-field phase images in STEM

被引:3
作者
Ishida, Takafumi [1 ]
Kawasaki, Tadahiro [2 ,3 ,4 ]
Tanji, Takayoshi [2 ,4 ]
Ikuta, Takashi [5 ]
机构
[1] Nagoya Univ, Grad Sch Engn, Dept Elect Engn & Comp Sci, Chikusa Ku, Nagoya, Aichi 4648603, Japan
[2] Nagoya Univ, EcoTopia Sci Inst, Chikusa Ku, Nagoya, Aichi 4648502, Japan
[3] Japan Fine Ceram Ctr, Nanostruct Res Lab, Atsuta Ku, Nagoya, Aichi 4568587, Japan
[4] Global Res Ctr Environm & Energy Based Nanomat Sc, Chikusa Ku, Nagoya, Aichi 4648502, Japan
[5] Osaka Electrocommun Univ, Fac Engn, Dept Elect & Elect Engn, Neyagawa, Osaka 5728530, Japan
关键词
scanning transmission electron microscopy; phase reconstruction; annular bright-field imaging; multi-channel detector; annular aperture; QUADRANT DETECTORS; WEAK PHASE; ELECTRON; RECONSTRUCTION; SPECIMENS;
D O I
10.1093/jmicro/dfu113
中图分类号
TH742 [显微镜];
学科分类号
摘要
A phase reconstruction method based on multiple scanning transmission electron microscope (STEM) images was evaluated quantitatively using image simulations. The simulation results indicated that the phase shift caused by a single atom was proportional to the 0.6th power of the atomic number Z. For a thin SrTiO3 [001] crystal, the reconstructed phase at each atomic column increased according to the specimen thickness. The STEM phase images can quantify the oxygen vacancy concentration if the thickness is less than several nanometers.
引用
收藏
页码:121 / 128
页数:8
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