An estimator for the MEMS capacitive accelerometer based on adaptive back stepping theory

被引：0

作者：

Payam, A. Farrokh ^{[1
]}

Hassani, F. Arab ^{[1
]}

Fathipour, M. ^{[1
]}

机构：

[1] Univ Tehran, ECE Dept, Device Modeling & Simulat Lab, Tehran 14174, Iran

来源：

2008 26TH INTERNATIONAL CONFERENCE ON MICROELECTRONICS, VOLS 1 AND 2, PROCEEDINGS | 2008年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a novel MEMS capacitive accelerometer which employs an estimator. This scheme is realized by adding an adaptive nonlinear observer to the conventional PID closed loop system. This estimator is used for online estimation of the parameter variations for MEMS accelerometers and gives the capability of self testing to the system. The performance of the proposed hybrid controller investigated here is validated by computer simulation.

引用

页码：341 / 344

页数：4

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