Conductance enhancement of polymethylmethacrylate bombarded by low-energy ions

被引：28

作者：

Koval, Y ^{[1
]}

Fistul, MV ^{[1
]}

Müller, P ^{[1
]}

机构：

[1] Univ Erlangen Nurnberg, Inst Phys 3, D-91058 Erlangen, Germany

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2005年 / 23卷 / 05期

关键词：

D O I：

10.1116/1.2006136

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

It has been found that films of polymethylmethacrylate (PMMA) show a substantial conductance after bombardment by Ar ions with energy of 250-1250 eV. The appearance of the conductance is attributed to graphitization processes in the subsurface layer. As the energy of ions increases, the conductivity of PMMA is greatly enhanced. We have found that, at low electric fields, the conductance is provided by variable range hopping with a strong influence of Coulomb interactions. At high electric fields, the transformed PMMA reveals non-Ohmic behavior: the conductance is an exponential function of root EIT. (c) 2005 American Vacuum Society.

引用

页码：1375 / 1378

页数：4

共 15 条

[1] THE EFFECT OF ION-IMPLANTATION ON POLYMER MASK RESISTANCE TO ION-BEAM ETCHING [J].

BORZENKO, TB ;

VYATKIN, AF ;

GONCHAKOVA, NN ;

ZINENKO, VI ;

KOVAL, YI ;

KUDRYASHOV, VA .

VACUUM, 1988, 38 (11) :1007-1009

[2] HYDROGENATED CARBON LAYERS PRODUCED BY ION-BEAM IRRADIATION OF PMMA AND POLYSTYRENE FILMS [J].

DAVENAS, J ;

THEVENARD, P ;

BOITEUX, G ;

FALLAVIER, M ;

LU, XL .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 46 (1-4) :317-323

[3] COULOMB-GAP MAGNETOTRANSPORT IN GRANULAR AND POROUS CARBON STRUCTURES [J].

FUNG, AWP ;

WANG, ZH ;

DRESSELHAUS, MS ;

DRESSELHAUS, G ;

PEKALA, RW ;

ENDO, M .

PHYSICAL REVIEW B, 1994, 49 (24) :17325-17335

[4] RADIATION-CHEMISTRY OF POLY(METHACRYLATES) [J].

HIRAOKA, H .

IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1977, 21 (02) :121-130

[5] Electronic transport properties of conducting polymers and carbon nanotubes [J].

Kaiser, AB .

REPORTS ON PROGRESS IN PHYSICS, 2001, 64 (01) :1-49

[6] Mechanism of etching and surface relief development of PMMA under low-energy ion bombardment [J].

Koval, Y .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2004, 22 (02) :843-851

[7] Use of polymethylmethacrylate for pattern transfer by ion beam etching: Improvement of etching homogeneity and patterning quality [J].

Koval, Y ;

Borzenko, T ;

Dubonos, S .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (05) :2217-2219

[8] Ion beam effects on the surface and on the bulk of thin films of polymethylmethacrylate [J].

Licciardello, A ;

Fragala, ME ;

Foti, G ;

Compagnini, G ;

Puglisi, O .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1996, 116 (1-4) :168-172

[9] Onset and growth of conduction in polyimide Kapton induced by swift heavy-ion irradiation [J].

Salvetat, JP ;

Costantini, JM ;

Brisard, F ;

Zuppiroli, L .

PHYSICAL REVIEW B, 1997, 55 (10) :6238-6248

[10] Structure and electronic properties of a nongraphitic disordered carbon system and its heat-treatment effects [J].

Takai, K ;

Oga, M ;

Sato, H ;

Enoki, T ;

Ohki, Y ;

Taomoto, A ;

Suenaga, K ;

Iijima, S .

PHYSICAL REVIEW B, 2003, 67 (21)

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