Visualizing acoustic displacements of capacitive micromachined transducers using an interferometric microscope

被引：12

作者：

Davis, LAJ ^{[1
]}

Billson, DR

Hutchins, DA

Noble, RA

机构：

[1] Univ Warwick, Sch Engn, Coventry CV4 7AL, W Midlands, England

[2] QinetiQ, Great Malvern WR14 3PS, Worcs, England

来源：

ACOUSTICS RESEARCH LETTERS ONLINE-ARLO | 2005年 / 6卷 / 02期

关键词：

D O I：

10.1121/1.1851391

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

The modification of a commercial Wyko optical profilometer to operate stroboscopically has been demonstrated. This has then been applied to the characterization of a micro-mechanical device subjected to high frequency periodic excitation. It is demonstrated that displacement amplitudes can be mapped across the surface of a micromachined transducer at ultrasonic frequencies. (C) 2005 Acoustical Society of America.

引用

页码：75 / 79

页数：5

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[7]

*WYK CORP, 1996, WYK SURF PROF TECHN

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