Standardless Atom Counting in Scanning Transmission Electron Microscopy

被引:193
作者
LeBeau, James M. [1 ]
Findlay, Scott D. [2 ]
Allen, Leslie J. [3 ]
Stemmer, Susanne [1 ]
机构
[1] Univ Calif Santa Barbara, Dept Mat, Santa Barbara, CA 93106 USA
[2] Univ Tokyo, Sch Engn, Inst Engn Innovat, Tokyo 1138656, Japan
[3] Univ Melbourne, Sch Phys, Melbourne, Vic 3010, Australia
基金
美国国家科学基金会; 澳大利亚研究理事会;
关键词
Scanning transmission electron microscopy (STEM); gold; nanoscale characterization; SURFACE ATOMS; STEM;
D O I
10.1021/nl102025s
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
We demonstrate that high-angle annular dark-field imaging in scanning transmission electron microscopy allows for quantification of the number and location of all atoms in a three-dimensional, crystalline, arbitrarily shaped specimen without the need For a calibration standard. We show that the method also provides for an approach to directly measure the finite effective source size of a scanning transmission electron microscope.
引用
收藏
页码:4405 / 4408
页数:4
相关论文
共 26 条
[1]   An approach to quantitative compositional profiling at near-atomic resolution using high-angle annular dark field imaging [J].
Anderson, SC ;
Birkeland, CR ;
Anstis, GR ;
Cockayne, DJH .
ULTRAMICROSCOPY, 1997, 69 (02) :83-103
[2]   Two-dimensional mapping of chemical information at atomic resolution [J].
Bosman, M. ;
Keast, V. J. ;
Garcia-Munoz, J. L. ;
D'Alfonso, A. J. ;
Findlay, S. D. ;
Allen, L. J. .
PHYSICAL REVIEW LETTERS, 2007, 99 (08)
[3]   THEORETICAL MEAN-SQUARE DISPLACEMENTS FOR SURFACE ATOMS IN FACE-CENTERED CUBIC LATTICES WITH APPLICATIONS TO NICKEL [J].
CLARK, BC ;
HERMAN, R ;
WALLIS, RF .
PHYSICAL REVIEW, 1965, 139 (3A) :A860-&
[4]   Atomic-resolution chemical mapping using energy-dispersive x-ray spectroscopy [J].
D'Alfonso, A. J. ;
Freitag, B. ;
Klenov, D. ;
Allen, L. J. .
PHYSICAL REVIEW B, 2010, 81 (10)
[5]   Method to measure spatial coherence of subangstrom electron beams [J].
Dwyer, Christian ;
Erni, Rolf ;
Etheridge, Joanne .
APPLIED PHYSICS LETTERS, 2008, 93 (02)
[6]   Parameterization of the temperature dependence of the Debye-Waller factors [J].
Gao, HX ;
Peng, LM .
ACTA CRYSTALLOGRAPHICA SECTION A, 1999, 55 :926-932
[7]  
GONZALEZ RC, 2008, DIGITAL IMAGE P
[8]   Element-selective imaging of atomic columns in a crystal using STEM and EELS [J].
Kimoto, Koji ;
Asaka, Toru ;
Nagai, Takuro ;
Saito, Mitsuhiro ;
Matsui, Yoshio ;
Ishizuka, Kazuo .
NATURE, 2007, 450 (7170) :702-704
[9]   Influence of orientation on the contrast of high-angle annular dark-field images of silicon [J].
Klenov, Dmitri O. ;
Findlay, Scott D. ;
Allen, Leslie J. ;
Stemmer, Susanne .
PHYSICAL REVIEW B, 2007, 76 (01)
[10]   Limitations in through-focus depth sectioning in non-aberration corrected high-angle annular dark-field imaging [J].
Klenov, Dmitri O. ;
Stemmer, Susanne .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2006, 45 (20-23) :L602-L604