Diffusion of Vacancies Created by High-Energy Heavy Ion Strike Into Diamond

被引：14

作者：

Onoda, Shinobu ^{[1
]}

Tatsumi, Kazumasa ^{[1
,2
]}

Haruyama, Moriyoshi ^{[1
,2
]}

Teraji, Tokuyuki ^{[3
]}

Isoya, Junichi ^{[4
]}

Kada, Wataru ^{[2
]}

Ohshima, Takeshi ^{[1
]}

Hanaizumi, Osamu ^{[2
]}

机构：

[1] Natl Inst Quantum & Radiol Sci & Technol, 1233 Watanuki, Takasaki, Gunma 3701292, Japan

[2] Gunma Univ, 1-5-1 Tenjin Cho, Kiryu, Gunma 3768515, Japan

[3] Natl Inst Mat Sci, 1-1 Namiki, Tsukuba, Ibaraki 3050044, Japan

[4] Univ Tsukuba, Res Ctr Knowledge Communities, 1-2 Kasuga, Tsukuba, Ibaraki 3058550, Japan

来源：

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2017年 / 214卷 / 11期

关键词：

activation energy; diffusion; ion tracks; nitrogen; vacancies; vacancy migration; SELF-DIFFUSION; CENTERS; DEFECTS; LIMIT;

D O I：

10.1002/pssa.201700160

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A novel technique is proposed to measure how far vacancies diffuse from the initial damaged region with sub-micrometer resolution. Vacancies created by a single heavy ion with high energy are considered. The most important feature of the single ion track is the quasi-one-dimensional vacancy distribution with high volume density, which exceeds 10(19)vacanciescm(-3). After annealing, the vacancies combine with nitrogen impurities to form nitrogen vacancy (NV) centers. With increasing annealing temperature and time, the distribution of NV centers becomes wider. Therefore, the vacancies created by a single heavy ion are suitable to investigate vacancy diffusion. The activation energy of vacancy migration in diamond is determined to be 2.12eV, which is in reasonable agreement with reported values.

引用

页数：6

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