Densely integrated array of chemiresistor vapor sensors with electron-beam patterned monolayer-protected gold nanoparticle interface films

Use of electron-beam induced crosslinking to pattern films of monolayer-protected gold nanoparticles (MPNs) onto a chemiresistor (CR) sensor array is described. Each of the four CRs comprises a 100 mu m(2) set of interdigital electrodes (IDEs) with 100 nm widths and spaces, separated from adjacent devices by 4 mu m. Films of four MPNs, each with a different thiolate monolayer, were successively patterned on the IDEs. Vapor exposures yield rapid, reversible changes in CR resistances and differential vapor sensitivities comparable to those reported for larger CRs with unpatterned MPN films. The array response patterns facilitate vapor discrimination. This is the smallest MPN-coated CR array yet reported. The advantages of using such an array as the detector in microfabricated gas chromatographic analyzers are considered.