Microfabricated textured surfaces for super-hydrophobicity investigations

被引:142
作者
Callies, M
Chen, Y
Marty, F
Pépin, A
Quéré, D
机构
[1] Coll France, CNRS, UMR 7125, Lab Phys Fluides Organises, F-75231 Paris, France
[2] CNRS, LPN, F-91460 Marcoussis, France
[3] Ecole Normale Super, F-75231 Paris, France
[4] SMM, Grp ESIEE, F-93162 Noisy Le Grand, France
关键词
microstructures; deep reactive ion etching; wetting properties; super-hydrophobicity;
D O I
10.1016/j.mee.2004.12.093
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The natural hydrophobicity of surfaces can be enhanced if they are micro-textured. This is due to air trapped in the structure, which provides the deposited drop with a composite surface made of solid and air on which it is resting. Here, we give evidence for this effect using a forest of micro-pillars which allows us to control the micro structure density under the drop, and thus the degree of super-hydrophobicity. For this purpose, silicon wafers were firstly patterned by conventional photolithography techniques. After deposition of an aluminium layer, the samples were subjected to a deep reactive ion etching (DRIE) with the "Bosch process" in order to achieve high aspect ratios (>= 10). However, this state is not always the most stable situation for a drop on a hydrophobic surface: the drop can also fill up the microstructure. We have been able to observe these two super-hydrophobic states on our surfaces and to characterize advancing and receding contact angles for both of them. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:100 / 105
页数:6
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