High responsive unimorph actuator of LaNi5 hydrogen storage alloy film deposited on polyimide sheet

被引:1
作者
Numasaki, K [1 ]
Honjoh, T [1 ]
Uchida, H [1 ]
Matsumura, Y [1 ]
Nishi, Y [1 ]
机构
[1] Tokai Univ, Dept Mat Sci, Hiratsuka, Kanagawa 2591292, Japan
来源
SMART MATERIALS III | 2005年 / 5648卷
关键词
mover device; unimorph structure; palladium; LaNi5; hydrogen storage alloy; thin film; ABSORPTION;
D O I
10.1117/12.582327
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this study, the effects of surface treatments were investigated on the mechanical response of the LaNi5 thin film actuator deposited on polyimide substrates. Since controlling the hydrogen concentration in film by reversible pressure change drives this actuator, this film actuator can be expected as a sensor and/or a controller of hydrogen gas flux in various hydrogen-related devices. This significantly improved mechanical response was attributed to the switching of the reactions in the rate determining steps.
引用
收藏
页码:178 / 183
页数:6
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