Tip current/positioning close-loop mode of scanning electrochemical microscopy for electrochemical micromachining

被引：10

作者：

Han, Lianhuan ^{[1
,2
]}

Zhao, Xuesen ^{[2
]}

Hu, Zhenjiang ^{[2
]}

Zhang, Jie ^{[3
,4
]}

Cao, Yongzhi ^{[2
]}

Yan, Yongda ^{[1
,2
]}

Tian, Zhong-Qun ^{[3
,4
]}

Tian, Zhao-Wu ^{[3
,4
]}

Zhan, Dongping ^{[3
,4
]}

机构：

[1] Harbin Inst Technol, Minist Educ, Key Lab Microsyst & Microstruct Mfg, Harbin 150001, Heilongjiang, Peoples R China

[2] Harbin Inst Technol, Ctr Precis Engn, POB 413, Harbin 150001, Heilongjiang, Peoples R China

[3] Collaborat Innovat Ctr Chem Energy Mat iChEM, State Key Lab Phys Chem Solid Surfaces PCOSS, Xiamen 361005, Peoples R China

[4] Xiamen Univ, Coll Chem & Chem Engn, Dept Chem, Xiamen 361005, Peoples R China

来源：

ELECTROCHEMISTRY COMMUNICATIONS | 2017年 / 82卷

基金：

中国国家自然科学基金;

关键词：

Scanning electrochemical microscopy; Electrochemical micromachining; Close-loop positioning mode; SECM; ECMM; FEEDBACK MODE; CONSTANT-DISTANCE; PRINCIPLES; SUBSTRATE; KINETICS; PROBE; SECM;

D O I：

10.1016/j.elecom.2017.07.023

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Scanning electrochemical microscopy (SECM) has been approved as a prospective electrochemical micromachining (ECMM) technique soon after its birth. However, it still remains challenge for SECM to fabricate arbitrary three-dimensional (3D) microstructures because of the limitation of positioning system. To solve this problem, we proposed a tip current signal/positioning close-loop mode in which the tip current signal is fed back to the positioning system in order to program the motion trial of SECM tip. Both the triedge-cone and sinusoidal microstructures were obtained by the close-loop positioning mode. The static-state etching process was demonstrated not to be disturbed by the slow motion rate of SECM tip. The unique positioning mode would be significant for both ECMM and electrochemical imaging.

引用

页码：117 / 120

页数：4

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