Tip current/positioning close-loop mode of scanning electrochemical microscopy for electrochemical micromachining

被引：10

作者：

Han, Lianhuan ^{[1
,2
]}

Zhao, Xuesen ^{[2
]}

Hu, Zhenjiang ^{[2
]}

Zhang, Jie ^{[3
,4
]}

Cao, Yongzhi ^{[2
]}

Yan, Yongda ^{[1
,2
]}

Tian, Zhong-Qun ^{[3
,4
]}

Tian, Zhao-Wu ^{[3
,4
]}

Zhan, Dongping ^{[3
,4
]}

机构：

[1] Harbin Inst Technol, Minist Educ, Key Lab Microsyst & Microstruct Mfg, Harbin 150001, Heilongjiang, Peoples R China

[2] Harbin Inst Technol, Ctr Precis Engn, POB 413, Harbin 150001, Heilongjiang, Peoples R China

[3] Collaborat Innovat Ctr Chem Energy Mat iChEM, State Key Lab Phys Chem Solid Surfaces PCOSS, Xiamen 361005, Peoples R China

[4] Xiamen Univ, Coll Chem & Chem Engn, Dept Chem, Xiamen 361005, Peoples R China

来源：

ELECTROCHEMISTRY COMMUNICATIONS | 2017年 / 82卷

基金：

中国国家自然科学基金;

关键词：

Scanning electrochemical microscopy; Electrochemical micromachining; Close-loop positioning mode; SECM; ECMM; FEEDBACK MODE; CONSTANT-DISTANCE; PRINCIPLES; SUBSTRATE; KINETICS; PROBE; SECM;

D O I：

10.1016/j.elecom.2017.07.023

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Scanning electrochemical microscopy (SECM) has been approved as a prospective electrochemical micromachining (ECMM) technique soon after its birth. However, it still remains challenge for SECM to fabricate arbitrary three-dimensional (3D) microstructures because of the limitation of positioning system. To solve this problem, we proposed a tip current signal/positioning close-loop mode in which the tip current signal is fed back to the positioning system in order to program the motion trial of SECM tip. Both the triedge-cone and sinusoidal microstructures were obtained by the close-loop positioning mode. The static-state etching process was demonstrated not to be disturbed by the slow motion rate of SECM tip. The unique positioning mode would be significant for both ECMM and electrochemical imaging.

引用

页码：117 / 120

页数：4

共 32 条

[1] Bard A. J., 2012, SCANNING ELECTROCHEM
[2] SCANNING ELECTROCHEMICAL MICROSCOPY .12. THEORY AND EXPERIMENT OF THE FEEDBACK MODE WITH FINITE HETEROGENEOUS ELECTRON-TRANSFER KINETICS AND ARBITRARY SUBSTRATE SIZE
BARD, AJ
MIRKIN, MV
UNWIN, PR
WIPF, DO
[J]. JOURNAL OF PHYSICAL CHEMISTRY, 1992, 96 (04) : 1861 - 1868
[3] SCANNING ELECTROCHEMICAL MICROSCOPY - INTRODUCTION AND PRINCIPLES
BARD, AJ
FAN, FRF
KWAK, J
LEV, O
[J]. ANALYTICAL CHEMISTRY, 1989, 61 (02) : 132 - 138
[4] A scanning electrochemical microscopy procedure for micropatterning Al2O3-thin films deposited on a platinum substrate
Battistel, Dario
Daniele, Salvatore
Fratter, Davide
[J]. ELECTROCHIMICA ACTA, 2012, 78 : 557 - 562
[5] Integrated Ultramicroelectrode-Nanopipet Probe for Concurrent Scanning Electrochemical Microscopy and Scanning Ion Conductance Microscopy
Comstock, David J.
Elam, Jeffrey W.
Pellin, Michael J.
Hersam, Mark C.
[J]. ANALYTICAL CHEMISTRY, 2010, 82 (04) : 1270 - 1276
[6] Feedback-independent Pt nanoelectrodes for shear force-based constant-distance mode scanning electrochemical microscopy
Etienne, Mathieu
Anderson, Emily C.
Evans, Stephanie R.
Schuhmann, Wolfgang
Fritsch, Ingrid
[J]. ANALYTICAL CHEMISTRY, 2006, 78 (20) : 7317 - 7324
[7] Electropolishing of titanium alloy under hydrodynamic mode
Huang, Pei
Lai, Junhui
Han, Lianhuan
Yang, Fang-Zu
Jiang, Li-Min
Su, Jian-Jia
Tian, Zhao-Wu
Tian, Zhong-Qun
Zhan, Dongping
[J]. SCIENCE CHINA-CHEMISTRY, 2016, 59 (11) : 1525 - 1528
[8] SCANNING ELECTROCHEMICAL MICROSCOPY - HIGH-RESOLUTION DEPOSITION AND ETCHING OF METALS
HUSSER, OE
CRASTON, DH
BARD, AJ
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1989, 136 (11) : 3222 - 3229
[9] Joshi S.S., 2014, COMPREHENSIVE MAT PR, P373
[10] Scanning electrochemical microscopy of a fuel-cell electrocatalyst deposited onto highly oriented pyrolytic graphite
Kucernak, AR
Chowdhury, PB
Wilde, CP
Kelsall, GH
Zhu, YY
Williams, DE
[J]. ELECTROCHIMICA ACTA, 2000, 45 (27) : 4483 - 4491

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