Heavy ion beam-based nano- and micro-structuring of TiO2 single crystals using self-assembled masks

被引：27

作者：

Jensen, J. ^{[1
]}

Skupinski, M. ^{[1
]}

Hjort, K. ^{[1
]}

Sanz, R. ^{[2
]}

机构：

[1] Uppsala Univ, Angstrom Lab, Dept Engn Sci, SE-75121 Uppsala, Sweden

[2] CSIC, Inst Ciencia Mat Madrid, Madrid 28049, Spain

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2008年 / 266卷 / 12-13期

关键词：

TiO2; ion tracks; ion lithography; colloidal mask; nanopatterning;

D O I：

10.1016/j.nimb.2008.03.220

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Fast heavy ion beam-based lithography using masks of self-assembled materials has been applied for transferring well-ordered nano- and micropatterns to rutile TiO2 single crystals. As the induced damage has a high etching selectivity the patterns can be developed in hydrofluoric acid with very high-contrast. Here we present resulting patterns when using a mask of self-ordered silica spheres. The obtained pattern are replicas of the mass distribution of the mask. In addition the shape and size of the regular structures depend on the applied ion energy and fluence. Direct modifications of the optical properties of TiO2 in a well-defined pattern are also presented. (c) 2008 Elsevier B.V. All rights reserved.

引用

页码：3113 / 3119

页数：7

共 37 条

[1] Photonic crystals of titanium dioxide fabricated by swift heavy ions [J].

Awazu, K ;

Fujimaki, M ;

Ohki, Y ;

Komatsubara, T .

RADIATION MEASUREMENTS, 2005, 40 (2-6) :722-729

[2] Fabrication of two- and three-dimensional photonic crystals of titania with submicrometer resolution by deep x-ray lithography [J].

Awazu, K ;

Wang, XM ;

Fujimaki, M ;

Kuriyama, T ;

Sai, A ;

Ohki, Y ;

Imai, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2005, 23 (03) :934-939

[3] Structure of latent tracks in rutile single crystal of titanium dioxide induced by swift heavy ions [J].

Awazu, Koichi ;

Wang, Xiaomin ;

Fujimaki, Makoto ;

Komatsubara, Tetsuo ;

Ikeda, Takahiro ;

Ohki, Yoshimichi .

JOURNAL OF APPLIED PHYSICS, 2006, 100 (04)

[4]

Bhushan B., 2004, HDB NANOTECHNOLOGY

[5]

BURMEISTER F, 1999, APPL SURF SCI, V461, P144

[6] MeV ion beam deformation of colloidal silica particles [J].

Cheang-Wong, JC ;

Morales, U ;

Oliver, A ;

Rodríguez-Fernández, L ;

Rickards, J .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2006, 242 (1-2) :452-454

[7] TRACKS OF HEAVY-IONS IN MUSCOVITE MICA - ANALYSIS OF THE RATE OF PRODUCTION OF RADIATION DEFECTS [J].

DARTYGE, E ;

SIGMUND, P .

PHYSICAL REVIEW B, 1985, 32 (08) :5429-5431

[8] The surface science of titanium dioxide [J].

Diebold, U .

SURFACE SCIENCE REPORTS, 2003, 48 (5-8) :53-229

[9]

Fujishima A., 1999, TIO2 PHOTOCATALYSIS

[10] Enhanced fluorescence emission from quantum dots on a photonic crystal surface [J].

Ganesh, Nikhil ;

Zhang, Wei ;

Mathias, Patrick C. ;

Chow, Edmond ;

Soares, J. A. N. T. ;

Malyarchuk, Viktor ;

Smith, Adam D. ;

Cunningham, Brian T. .

NATURE NANOTECHNOLOGY, 2007, 2 (08) :515-520

← 1 2 3 4 →