Effects of crystallization on the optical properties of ZnO nano-pillar thin films by sol-gel method

被引:27
作者
Chen, K. J. [1 ]
Hung, F. Y. [1 ]
Chang, S. J. [2 ,3 ]
Young, S. J. [4 ]
Hu, Z. S. [5 ]
机构
[1] Natl Cheng Kung Univ, Ctr Micro Nano Sci & Technol, Inst Nanotechnol & Microsyst Engn, Tainan 701, Taiwan
[2] Natl Cheng Kung Univ, Ctr Micro Nano Sci & Technol, Inst Microelect, Tainan 701, Taiwan
[3] Natl Cheng Kung Univ, Ctr Micro Nano Sci & Technol, Dept Elect Engn, Tainan 701, Taiwan
[4] Natl Formosa Univ, Dept Elect Engn, Yunlin 632, Taiwan
[5] Natl Cheng Kung Univ, Ctr Micro Nano Sci & Technol, Inst Electroopt Sci & Engn, Tainan 701, Taiwan
关键词
ZnO; Nano-pillar; Sol-gel; Crystallization; GROWTH; PHOTOLUMINESCENCE; TEMPERATURE; FABRICATION; NANOWIRES; MECHANISM; ARRAY;
D O I
10.1016/j.cap.2011.03.033
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
ZnO nano-pillars were prepared on the silica glass by the sol-gel method. The films were crystallized at various crystallized temperatures (600 degrees C, 650 degrees C and 700 degrees C) for 1 h under a pure oxygen atmosphere. The ZnO films had hexagonal structures and preferred a c-axis orientation of (002). Due to the diffused zinc atoms recombining with oxygen atoms at higher temperatures (>= 650 degrees C), the ZnO nano-pillars grew continually from the ZnO grains or the ZnO grain boundaries. When increasing the crystallizing temperature, the quality of ZnO crystallization not only improved, but the ZnO nano-pillars also grew significantly and their length was around 30-150 nm. Notably, a severe decomposition reaction reduced the total volume of crystallization matrix (residual ZnO thin films and increased ZnO nano-pillars). The nano-pillar-thin film of 650 degrees C not only possessed a better crystallization, but also had the efficacy of nano-pillars that enhanced the optical characteristics. In addition, 5 at.% indium-doped ZnO was also synthesized and then compared with un-doped ZnO to clarify the contribution of indium dopants. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码:1243 / 1248
页数:6
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