A resonator microwave sensor for measuring the parameters of silicon

被引：0

作者：

Yurchenko, A. V. ^{[1
]}

Novikov, A. N. ^{[1
]}

Kitaeva, M. V. ^{[1
]}

机构：

[1] Tomsk Natl Res Polytech Univ, Tomsk, Russia

来源：

RUSSIAN JOURNAL OF NONDESTRUCTIVE TESTING | 2012年 / 48卷 / 02期

关键词：

photoelectric transducer; microwave sensor;

D O I：

10.1134/S1061830912020118

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Nondestructive microwave and optical methods for contactless local measurements of resistivity, the lifetimes of minority charge carriers in single-crystal and polycrystalline semiconductors, and lifetimes in photoelectric transducers are investigated.

引用

页码：109 / 114

页数：6

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