Micro-optical bench for alignment-free optical coupling

被引:21
作者
Aoki, Y [1 ]
Kato, T [1 ]
Mizuno, RJ [1 ]
Iga, K [1 ]
机构
[1] Tokyo Inst Technol, Precis & Intelligence Lab, Midori Ku, Yokohama, Kanagawa 2268503, Japan
关键词
D O I
10.1364/AO.38.000963
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We propose an optical coupling module, the micro-optical bench, designed for the purpose of completely passive alignment of optical components. The principle is for one to position a planar microlens array, semiconductor device submounts, and optical fibers by using reference planes and V grooves made on a Si substrate. A prototype was fabricated, and we achieved an optical coupling loss of less than 3 dB; small deviations among channels as low as 1 dB were achieved without any precise alignment. For multimode fibers, a coupling loss of approximately 0.5 dB was obtained. (C) 1999 Optical Society of America.
引用
收藏
页码:963 / 965
页数:3
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