Modified surface testing method for large convex aspheric surfaces based on diffraction optics

被引：14

作者：

Zhang, Haidong ^{[1
,2
]}

Wang, Xiaokun ^{[1
]}

Xue, Donglin ^{[1
]}

Zhang, Xuejun ^{[1
]}

机构：

[1] Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, Changchun 130033, Jilin, Peoples R China

[2] Univ Chinese Acad Sci, Beijing 100049, Peoples R China

来源：

APPLIED OPTICS | 2017年 / 56卷 / 34期

关键词：

COMPUTER-GENERATED HOLOGRAMS; TEST PLATE; DESIGN; MIRROR;

D O I：

10.1364/AO.56.009398

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Large convex aspheric optical elements have been widely applied in advanced optical systems, which have presented a challenging metrology problem. Conventional testing methods cannot satisfy the demand gradually with the change of definition of "large." A modified method is proposed in this paper, which utilizes a relatively small computer-generated hologram and an illumination lens with certain feasibility to measure the large convex aspherics. Two example systems are designed to demonstrate the applicability, and also, the sensitivity of this configuration is analyzed, which proves the accuracy of the configuration can be better than 6 nm with careful alignment and calibration of the illumination lens in advance. Design examples and analysis show that this configuration is applicable to measure the large convex aspheric surfaces. (C) 2017 Optical Society of America

引用

页码：9398 / 9405

页数：8

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