Atmospheric-pressure glow discharge CVD of composite metallic aluminium thin films

被引：8
作者：
Sheel, David W. [1 ]
Hodgkinson, John L. [1 ]
机构：
[1] Univ Salford, Mat Res Inst, Salford M5 4WT, Lancs, England
来源：
PLASMA PROCESSES AND POLYMERS | 2007年 / 4卷 / 05期
关键词：
D O I：
10.1002/ppap.200700001
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We present the first reported investigation exploring the deposition of composite metal/metal oxide thin films using APGD CVD. The approach taken employs a parallel-plate dielectric barrier configuration, and the deposition of such materials is discussed with respect to their influence on discharge conditions. Controlled and variable composition films were produced based on aluminium which showed metallic-like reflection (up to 60% visible), and were conductive (approximate to 1 Omega per square). The films are analysed by RBS, SEM, AFM and optical spectroscopy. This new class of APGD-CVD-derived thin-film material, when combined with the associated low thermal load and attractions for industrial scaling, offers significant potential for new applications.
引用
收藏
页码：537 / 547
页数：11
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