Process window for growth of polar-axis-oriented tetragonal (Bi, K)TiO3 epitaxial films on (100)cSrRuO3//(100)SrTiO3 substrates by the hydrothermal method

被引:0
|
作者
Kubota, Rurika [1 ]
Tateyama, Akinori [1 ]
Ito, Yoshiharu [1 ,2 ]
Yuxian, Hu [1 ]
Shiraishi, Takahisa [1 ]
Kurosawa, Minoru [3 ]
Funakubo, Hiroshi [1 ]
机构
[1] Tokyo Inst Technol, Dept Mat Sci & Engn, Yokohama, Kanagawa 2268502, Japan
[2] Nihon Univ, Dept Appl Mol Chem, Narashino, Chiba 2758575, Japan
[3] Tokyo Inst Technol, Dept Elect & Elect Engn, Yokohama, Kanagawa 2268502, Japan
基金
日本科学技术振兴机构;
关键词
POTASSIUM BISMUTH TITANATE; CHEMICAL-VAPOR-DEPOSITION; PLATE-LIKE NA0.5BI0.5TIO3; ELECTRICAL-PROPERTIES; K0.5BI0.5TIO3; FERROELECTRICS; CERAMICS; EVOLUTION;
D O I
10.1007/s10853-022-07484-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
(Bi, K)TiO3 is a lead-free ferroelectric material that has large tetragonality at room temperature. High-quality films of (Bi, K)TiO3 have been difficult to grow due to the high volatilities of the constituent Bi and K. Epitaxial tetragonal (Bi, K)TiO3 films with large remanent polarization of about 84 mu C/cm(2) were grown on (100)(c)SrRuO3//(100)SrTiO3 substrates by the hydrothermal method. In this study, we systematically investigated the effects of the input amounts of the starting materials on the compositions, crystal structures, and ferroelectric properties of films grown on (100)(c)SrRuO3//(100)SrTiO3 substrates. As a resultant, (001)-oriented (Bi, K)TiO3 single-phase films were obtained with input Bi/(Bi + Ti) ratios of 0.056-0.450 at a KOH concentration of 10.0 mol/L. This indicates an approximately one-order-wide process window of the input Bi/(Bi + Ti) source ratio for (001)-oriented (Bi, K)TiO3 single-phase films. On the other hand, these films were also obtained at KOH concentrations of 8.0 - 13.5 mol/L and with a fixed input Bi/(Bi + Ti) source ratio of 0.22. This suggests the high reproducibility of (001)-oriented (Bi, K)TiO3 films even with fluctuations in the input source amount. In addition, all films deposited within this KOH concentration range showed large remanent polarization of about 84 mu C/cm(2). Moreover, good insulation characteristics were achieved for the films deposited at higher KOH concentrations of 10.0 to 13.5 mol/L.
引用
收藏
页码:14003 / 14014
页数:12
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