Self-Mixing Laser Sensor for Short-Distances Measurement

被引：0

作者：

Norgia, Michele ^{[1
]}

Kun, Li ^{[1
]}

Palludo, Alessandro ^{[1
]}

Cavedo, Federico ^{[1
]}

Pesatori, Alessandro ^{[1
]}

机构：

[1] Politecn Milan, Dipartimento Elettron Informaz & Bioingn, Piazza Leonardo da Vinci 32, I-20131 Milan, Italy

来源：

PROCEEDINGS OF THE 12TH INTERNATIONAL AIVELA CONFERENCE ON VIBRATION MEASUREMENTS BY LASER AND NONCONTACT TECHNIQUES: ADVANCES AND APPLICATIONS | 2016年 / 1740卷

关键词：

VELOCITY-MEASUREMENT; CLOSED-LOOP; INTERFEROMETRY; DIODE; FEEDBACK; VIBROMETER; FLOW; VIBRATION;

D O I：

10.1063/14952694

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This work describes the development of a laser instrument for measuring very-short distances with a minimum sensor size. The absolute distance measurement is obtained through a modulated self-mixing interferometer, realized with a lens-less red VCSEL laser. In a range between 2 mm and 5 mm the sensor shows a resolution of 10 mu m at 6.6 kHz of acquisition rate. The sensor size is limited to the laser chip and the contacts; therefore, it is applicable also in very demanding applications, such as the diameter measurement of a hole.

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页数：12

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