Optimization of 5V power devices based on CMOS for hot-carrier degradation

被引:0
|
作者
Nakamura, K [1 ]
Naka, T [1 ]
Matsushita, K [1 ]
Matsudai, T [1 ]
Yasuhara, N [1 ]
Endo, K [1 ]
Suzuki, F [1 ]
Nakagawa, A [1 ]
机构
[1] Toshiba Co Ltd, Semicond Co, Discrete Semicond Div, Saiwai Ku, Kawasaki, Kanagawa 2128583, Japan
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中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We propose "power CMOS," suitable for use as large current output devices. The proposed structure can be fabricated by low cost 0.6um logic CMOS process and assures long-term reliability even under the stress of hot-electrons. The developed power CMOS have achieved low specific on resistances of 8.1m Omega mm(2) for NMOS and 21.1 m Omega mm(2) for PMOS.
引用
收藏
页码:335 / 338
页数:4
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