Sapphire optical fiber high-temperature vibration sensor

被引：38

作者：

Cui, Yang ^{[1
]}

Jiang, Yi ^{[1
]}

Zhang, Yutong ^{[1
]}

Feng, Xinxing ^{[1
]}

Hu, Jie ^{[2
]}

Jiang, Lan ^{[2
]}

机构：

[1] Beijing Inst Technol, Sch Opt & Photon, Minist Ind & Informat Technol, Key Lab Photon Informat Technol, Beijing 100081, Peoples R China

[2] Beijing Inst Technol, Sch Mech Engn, Laser Micro Nano Fabricat Lab, Beijing 100081, Peoples R China

来源：

OPTICS EXPRESS | 2022年 / 30卷 / 02期

基金：

中国国家自然科学基金;

关键词：

ACCELEROMETER; INTERROGATION; SYSTEM;

D O I：

10.1364/OE.447449

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A sapphire fiber high-temperature vibration sensor with an extrinsic Fabry-Perot interferometer (EFPI) structure is proposed and experimentally demonstrated. The vibrating diaphragm of the sensor is a supported beam structure fabricated by etching a single-side polished sapphire wafer using a femtosecond laser. The FP cavity of the sensor is composed of the sapphire fiber end face and the polished surface of the vibrating diaphragm. The interference signal of the sensor is picked up by the sapphire fiber and transmitted to a laser interferometry demodulator through a multimode fiber. Experimental results show that the acceleration response is linear in the range of 0-10 g along with an acceleration sensitivity of 20.91 nm/g. The resonance frequency of the sensor is 2700 Hz, which is consistent with the ANSYS simulation results. The sensor can also work in the temperature range from room temperature to 1500 degrees C, providing a feasible method for vibration measurements in high-temperature environments. (C) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement

引用

页码：1056 / 1065

页数：10

共 29 条

[1] Focused ion beam post-processing of optical fiber Fabry-Perot cavities for sensing applications [J].