An opto-mechatronic magnetic field microsensor

被引：2

作者：

Chang, H. C. ^{[1
]}

Hwang, C. C. ^{[2
]}

Lai, C. C. ^{[1
]}

Tseng, C. L. ^{[1
]}

机构：

[1] Feng Chia Univ, Dept Automat Control Engn, Taichung 40724, Taiwan

[2] Feng Chia Univ, Dept Elect Engn, Taichung 40724, Taiwan

来源：

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2007年 / 204卷 / 12期

关键词：

D O I：

10.1002/pssa.200777340

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

An opto-mechatronic microsensor based on fiber Bragg grating technology for sensing magnetic field strength is developed and tested. The device is fabricated using low temperature silicon-based MEMS compatible technologies. A uniform Fe/Ni layer and embedded Fe/Ni flaps are deposited on the elastic membrane respectively that are actuated by external magnetic field for evaluating sensitivity. The Bragg wavelength shift of 0.37 nm was measured at the distance of 0.32 mm between the microsensor and a magnet with flux density of 1.12 T. (c) 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

引用

页码：4079 / 4082

页数：4

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